Technical Manufacturing Corporation (TMC) (Peabody, MA) offers Electro-Damp® PZT active inertial vibration cancellation system for use in microlithography, inspection, and metrology tools. Electro-Damp PZT is an active, inertially damped, pneumatic vibration isolator. Electro-Damp features extended stroke piezoelectric actuators, fast settling time in response to stage motion, and it has no soft air suspension. Available in either 3 or 6 degrees-of-freedom, the compact Electro-Damp PZT installs easily.
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