2008

Vibration Cancellation System

altTechnical Manufacturing Corporation (TMC) (Peabody, MA) offers Electro-Damp® PZT active inertial vibration cancellation system for use in microlithography, inspection, and metrology tools. Electro-Damp PZT is an active, inertially damped, pneumatic vibration isolator. Electro-Damp features extended stroke piezoelectric actuators, fast settling time in response to stage motion, and it has no soft air suspension. Available in either 3 or 6 degrees-of-freedom, the compact Electro-Damp PZT installs easily.

For Free Info Visit http://info.hotims.com/15128-208

White Papers

Introduction to Hypervisor Technology
Sponsored by Curtiss-Wright Controls Embedded Computing
Internet of Things
Sponsored by HP
An Introduction to Stress Analysis and Transducer Design Using Strain Gauges
Sponsored by HBM
OEM Optical System Development
Sponsored by Ocean Optics
Looking at Ceramic Carbides in a New Light
Sponsored by Goodfellow
Identification of Circuit Card Assembly Contamination Using NIR Spectroscopy
Sponsored by Ocean Optics

White Papers Sponsored By: