- Created: Saturday, 01 November 2008
CyberOptics Semiconductor (Beaverton, OR) introduces its WaferSenseTM Auto Vibration System (AVS) that monitors three-axis accelerations and equipment vibration. The WaferSense AVS is a wireless, wafer-like accelerometer available in a 200mm or 300mm format that moves through semiconductor process equipment and automation material handling systems. It reports x, y and z acceleration, has a range of ±2 G, and can detect wafer slides, slips, bumps, scrapes and rough handling.
For Free Info Visit http://info.hotims.com/15142-217