Nanotip Carpets as Antireflection Surfaces
- Thursday, 21 August 2008
Reflectance less than 10–3 is readily achieved.
Carpetlike random arrays of metal-coated silicon nanotips have been shown to be effective as antireflection surfaces. Now undergoing development for incorporation into Sun sensors that would provide guidance for robotic exploratory vehicles on Mars, nanotip carpets of this type could also have many uses on Earth as antireflection surfaces in instruments that handle or detect ultraviolet, visible, or infrared light.NPO-40123), NASA Tech Briefs, Vol. 28, No. 1 (November 2004), page 62. In the first step, which is not part of the previously reported process, photolithography is performed to deposit etch masks to define the 50-μm apertures on a silicon substrate. In the second step, which is part of the previously reported process, the non-masked silicon area between the apertures is subjected to reactive ion etching (RIE) under a special combination of conditions that results in the growth of fluorine-based compounds in randomly distributed formations, known in the art as “polymer RIE grass,” that have dimensions of the order of microns.
This work was done by Youngsam Bae, Sohrab Mobasser, Harish Manohara, and Choonsup Lee of Caltech for NASA’s Jet Propulsion Laboratory.
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Refer to NPO-42592, volume and number of this NASA Tech Briefs issue, and the page number.
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