McPherson, Inc. (Chelmsford, MA) has released the 251MX x-ray and extreme ultraviolet (EUV) spectrometer, for wavelength dispersive spectral measurements from 0.6 to 20nm (60 to 2000eV). The 251MX provides corrected, flat field spectra with its selection of specially designed diffraction gratings. Data is acquired quickly and easily with direct-detection charge coupled detectors (CCDs). The 251MX is suitable for applications such as soft x-ray plasma diagnostics, analysis of high order harmonic generated coherent EUV lasers, characterization of extreme ultraviolet sources for high resolution imaging, and advanced semiconductor lithography processes.
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