The ANT95-XY and ANT95-XY-H dual-axis linear motor stages from Aerotech, Pittsburgh, PA, allow travel in X and Y dimensions. They allow critical elements such as orthogonality, straightness, and flatness to be optimized. The technology has no hysteresis or backlash, enabling 5nm resolution, 50nm repeatability, and 250m accuracy in both X and Y dimensions. Both the 25 × 25mm or 50 × 50mm travel options come with a 60mm profile height.
The motor stages use anti-creep cross-roller bearings for high load capacity as well as high precision. The direct-drive technology is non-cogging, non-contact, high speed, high resolution, and high accuracy.