The PMT320 precision linear stage from Steinmeyer Inc., Burlington, MA, provides a repeatability of +/1 micron and travel distances of 600 to 1,500nm. It has a 320mm wide die-cast base profile, a 1,000mm stroke, and weighs 70kg.
The stage is available with a servo linear motor or DC rotary motor with precision ball screw. Depending on the drive chosen, the stage achieves maximum acceleration of 5m/sec2 and maximum speed of 500mm/sec2. Load capacity is 500kg. Flatness and straightness run-out is +/-2 microns over a 100mm travel range.