The Nano-SP30 positioning system from Mad City Labs (Madison, WI) is suited for nano-indentation and nano manipulation applications. It provides 25mm of travel with a step size of 95nm. A piezo-driven stage achieves positioning resolution of 0.1nm over 30 microns.
The positioner incorporates high-resolution position sensors with real-time readback and closed-loop control. It also accepts feedback from external sensors through a USB-enabled controller.
For more info, contact http://info.hotims.com/22908-314