A Data Matrix Method for Improving the Quantification of Element Percentages of SEM/EDX Analysis

A simple 2D M×N matrix involving sample preparation enables the microanalyst to peer below the noise floor of element percentages reported by the SEM/EDX (scanning electron microscopy/energy dispersive x-ray) analysis, thus yielding more meaningful data.

Using the example of a 2×3 sample set, there are M = 2 concentration levels of the original mix under test: 10 percent ilmenite (90 percent silica) and 20 percent ilmenite (80 percent silica). For each of these M samples, N = 3 separate SEM/EDX samples were drawn. In this test, ilmenite is the element of interest. By plotting the linear trend of the M sample’s known concentration versus the average of the N samples, a much higher resolution of elemental analysis can be performed. The resulting trend also shows how the noise is affecting the data, and at what point (of smaller concentrations) is it impractical to try to extract any further useful data.

This work was done by John Lane of Kennedy Space Center. For further information, contact the Kennedy Innovative Partnerships Program Office at (321) 861- 7158. KSC-13303

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