RASIRC® (San Diego,CA) has introduced the Steamer '02, which generates purified steam from de-ionized water for semiconductor, MEMS, solar, and optical device applications. It features additional control loop for the heated steam process line between the Steamer and the tool, integrated flow meter, reduced footprint and simplified installation with the addition of an internal three-way valve, and improved tracking of flow rate and energy use with an updated user interface. The Steamer ’02 allows the use of de-ionized water for critical processes by removing volatiles, ionic contaminants, and other impurities from steam.
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