The Micro-optics business unit of Jenoptik Optical Systems, Huntsville AL, has expanded its single crystal Calcium Fluoride (CaF2) process capabilities for applications in the semiconductor market. The product range of CaF2 micro-optics include diffractive and refractive devices like Gaussian homogenizers, refractive fly’s-eye homogenizers, diffractive lenses, lens arrays for fill factor enhancement, as well as DOEs for mask inspection and illumination. The homogenizers and fly’s-eye lens arrays can be designed with rectangular apertures, reducing the number of required elements to homogenize an anamorphic or rectangular field. The products are provided using substrates from 75-150 mm diameter and thicknesses from 0.5-6 mm.
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