MICOS USA (Irvine, CA) offers a multiphase piezo nanopositioner that reduces stick-slip signature for nanopositioning applications. The motor uses at least two piezos and friction elements that move in unison, but slip at different times, minimizing the retract motion induced by the slip forces onto the sliding element, and reducing or eliminating the backward motion during the slip phase. The motor has 12-mm travel with <1 mm motor resolution, 5-nm linear encoder resolution, and 1 kg horizontal load capacity.

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