Low-Dead-Volume Inlet for Vacuum Chamber
- Created: Saturday, 01 May 2010
Gas introduction from near-ambient pressures to high vacuum traditionally is accomplished either by multi-stage differential pumping that allows for very rapid response, or by a capillary method that allows for a simple, single-stage introduction, but which often has a delayed response. Another means to introduce the gas sample is to use the multi-stage design with only a single-stage. This is accomplished by using a very small conductance limit. The problem with this method is that a small conductance limit will amplify issues associated with dead-volume.
This work was done by Guy Naylor and C. Arkin of ASRC Aerospace Corporation for Kennedy Space Center. For further information, contact the Kennedy Innovative Partnerships Program Office at (321) 861- 7158. KSC-13317