Rotary Servo Table
Created: Thursday, 01 December 2011
The Planar ServoRing™ rotary table
PSR300 from IntelLiDrives (Philadelphia, PA)
features a low profile and
minimizes stage height.
Angular contact bearings
are used to minimize
stiffness, and friction. The
table has a clear center aperture that can be
used for air or wire line feed-through or beam
delivery. Brushless direct drive uses three-phase
planar brushless motor technology. A
low-cog magnetic design enables smooth rotation.
The table features an 18,000-line
encoder for 0.1 arc-sec positioning resolution,
and the motor and rotary encoder are directly
coupled to eliminate backlash.
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