PI’s (Auburn, MA) P-563.3CD PIMars stage is a piezo flexure-guided scanning/ nanomanipulation system. The unit enables precision motion control with resolution in the sub-nanometer realm and 340 × 340 × 340 μm travel in XYZ. Integrated, direct-measuring capacitance sensors and digital closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages. PIMars stages incorporate high-force solid state piezo actuator drives, frictionless flexure guiding systems and absolute measuring capacitive position sensors. The high force of the solid state piezo actuators allows for fast response in the millisec range and high scanning frequencies.
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