The Dover (Westborough, MA) MMG Mini-Mag line of precision linear motor
tables are now available in aluminum-based versions with an optional
single phase motor to reduce controller complexity, system footprint
and cost. For XY sample positioning, sustained throughput of up to
2,000 moves per minute is possible. For focal plane definition, the
optimum Z position of the magnifying objective is determined, and the
vertical objective positioning moves (<5um) are often accomplished in
<20ms, which can occur in parallel with the XY positioning motion.
During frame capture, in-position stability is vital to producing
quality images, and MMG provides position stability typically less than
100nm. Four options, with 25mm, 50mm 100mm or 150mm travel, are
currently available. Each model is capable of repeatability to ±0.4um
(with 0.1um or better encoder) and is rated for 8kg load capacity.
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