2012

Piezo-Positioning Stage

altPiezosystem jena (Hopedale, MA) has introduced the PX 100 CAP piezoelectric nanopositioning stage that features a travel range up to 100 μm of motion in closed-loop mode. A highresolution capacitive feedback sensor is built in. The sensor measures a deviation with sub-nanometer accuracy, and operates in a direct metrology fashion. The stage measures 40 × 40 × 20 mm, and is designed for highprecision positioning of small components such as mirrors or other optical components.





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