Aerotech (Pittsburgh, PA) offers the QNP-XY series piezo nanopositioning stages with resolution to 0.15 nm, linearity to 0.007%, and repeatability to 2 nm. The stages provide a variety of travel lengths (100 μm to 600 μm), feedback options, and vacuum versions, as well as resonant frequency up to 885 Hz. The capacitive sensors measure the output of the positioning carriage directly. The stages are available with capacitance sensor feedback or without feedback (open-loop). Open-loop provides an option for applications where compact size, high dynamics, and subnanometer positioning resolution are required, but absolute positioning accuracy and repeatability are not required. Open-loop designs can also be used where the piezo position is controlled via an external feedback source (interferometer, vision system, photodetector, etc.).
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