Equipment for On-Wafer Testing From 220 to 325 GHz
- Tuesday, 10 April 2007
On-wafer vector network analysis of semiconductors is extended to higher frequencies.
A system of electronic instrumentation, constituting the equivalent of a two-port vector network analyzer, has been developed for use in on-wafer measurement of key electrical characteristics of semiconductor devices at frequencies from 220 to 325 GHz. A prior system designed according to similar principles was reported in “Equipment for On-Wafer Testing at Frequencies Up to 220 GHz” (NPO-20760), NASA Tech Briefs, Vol. 25, No. 11 (November 2001), page 42. As one would expect, a major source of difficulty in progressing to the present higherfrequency- range system was the need for greater mechanical precision as wavelengths shorten into the millimeter range, approaching the scale of mechanical tolerances of prior systems.
This work was done by Lorene Samoska, Alejandro Peralta, Douglas Dawson, and Karen Lee of Caltech; Greg Boll of GGB Industries; and Chuck Oleson of Oleson Microwave Labs for NASA’s Jet Propulsion Laboratory. For further information, access the Technical Support Package (TSP) free online at www.techbriefs.com/tsp under the Semiconductors & ICs category. NPO-40955
This Brief includes a Technical Support Package (TSP).
Equipment for On-Wafer Testing From 220 to 325 GHz (reference NPO-40955) is currently available for download from the TSP library.
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