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Optical Research Associates (Pasadena, CA) introduces CODE V® 9.81 optical design software with aspheric lens tolerancing capabilities that are valuable in the fabrication of optical elements. The Fabrication Data analysis feature provides a way to visualize interferogram data on a lens surface, entrance pupil, or exit pupil, including the ability to see rotation and scaling effects. Functions have been added to the Partial Coherence analysis and TOR tolerancing features, which provide direct information about the critical dimension of the image, assuming a one-dimensional, partially coherent image, which is the standard design metric for microlithography.

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