Newport Corp. (Irvine, CA), has introduced the FMSxxHA high-accuracy FMS stages for surface metrology applications. The stages are available in 100-, 200-, and 300-mm models. With all-steel construction, the stages combine high stiffness and thermal stability. The crossed roller bearings have an anti-creep feature to provide smooth and straight motion. The steel ball screw is designed for highspeed motion. The stages are driven by a stepper motor, with a linear encoder that provides on-axis accuracy down to 1μm and submicron bidirectional repeatability.