Features

Linear Motor Stages

The PlanarDL-series stages from Aerotech (Pittsburgh, PA) are available in nine different travel and performance configuration applications ranging from high-accuracy surface profilometry to high-speed semiconductor and LED wafer scribing. The PlanarDL XY design allows for use in applications where straightness and flatness of motion are critical. Capable of achieving 1 m/s velocities and 1.5 g accelerations, the stages enable high-throughput and the company’s proprietary directdrive technology.

The PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimization of each individual axis for the specific application and process parameters. Regardless of the number of motors selected, the resulting drive force acts through the centers of friction and stiffness. The stages are available in three positioning performance options: -BASE, -PLUS and -ULTRA. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±400 nm, and orthogonality down to 1 arc second.

 

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