
An improved process for the fabrication of random arrays of silicon nanotips has been demonstrated to be feasible. Relative to other such processes, this process offers advantages of low cost and simplicity. Moreover, this process can readily be combined with other processes used to fabricate integrated circuits and other monolithic silicon structures.
Viewing entire briefs requires login/registration. Registration is free and easy to complete. If you're already registered with Tech Briefs, simply login at the top of the page.