Rapid DC Magnetron Sputtering
- Created on Monday, 01 October 2007
DC magnetron sputtering provides a very durable and stable coating that has many high-energy laser (HEL) and industrial applications, especially in producing coatings for high-reflectivity (HR) mirrors and anti-reflection (AR) coated windows. However, the DC magnetron sputtering deposition process is extremely slow. This slow deposition results in long coating run times that translate into increased coating cost. An organization wants to reduce magnetron sputtering deposition times from 17 hours to 2 or 3 hours, while meeting current coating performance requirements. Coatings must meet MIL-C- 48497A environmental requirements.
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