A MEMS (microelectromechanical systems) micro-translation stage (MTS) with large linear travel capability was developed that uses capacitive electrostatic forces created by stators arranged linearly on both sides of a channel, and matching rotors on a moveable shuttle for precise movement of the shuttle. The device, which is essentially a linear motor built from silicon base with microfabrication techniques, will be able to rapidly translate across large distances using only three-phase power. The moveable shuttle can be as small as 100 mm and can house a variety of elements including lenses and mirrors. The shuttle can be tailored to travel distances as small as 10 mm and as large as 300 mm, with as little as 10 mm between adjacent shuttle stops.

Manipulating the capacitive forces with three-phase power enables precise movement of the shuttle in either a stepping mode with many interim stops, or in a controlled scanning mode with adjustable speed. The device is built using standard MEMS processing technologies, and the ultimate translation length is determined by the photolithography process and the wafer size that can be accommodated in the MEMS fabrication equipment.

The translation stage at the heart of the device is the key to its flexibility in applications such as optics, communications, sensors, and biotechnology. The translation stage can move at speeds of 25 mm/ms, providing a method for rapid modulation of a laser source. The stage can also house a variety of elements such as lenses, mirrors, absorbers, and sampling compartments that would be useful in many applications.

This work was done by Cynthia Ferguson of Marshall Space Flight Center, and Jennifer English, Gregory Nordin, and Mustafa Abushagur of the University of Alabama Huntsville. For more information, contact Ronald C. Darty, Licensing Executive in the MSFC Technology Transfer Office, at This email address is being protected from spambots. You need JavaScript enabled to view it.. Refer to MFS-31789-1.