| Property | Value |
| Name | Vacuum Packaging of MEMS With Multiple Internal Seal Rings |
| Description | The Multiple Internal Seal Ring (MISR) MEMS vacuum package design eliminates the need for electrical lines running beneath the seal ring and thus eliminates the resulting vacuum leaks and/or planarization step costs. |
| Filename | NPO40335.pdf |
| Filesize | 125.75 kB |
| Filetype | pdf (Mime Type: application/pdf) |
| Creator | selinsky |
| Created On: | 02/01/2008 10:03 |
| Viewers | Everybody |
| Maintained by | Editor |
| Hits | 17 Hits |
| Last updated on | 02/01/2008 10:05 |
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