| Property | Value |
| Name | Range-Gated Metrology With Compact Optical Head |
| Description | This technology will enable cost-effective "metrology webs," in which tens or hundreds of measurement beams are deployed to monitor the dimensional stability of an instrument or structure with subnanometer accuracy and minimal footprint. |
| Filesize | 239.44 kB |
| Last updated on | 06/30/2008 11:40 |


























