The term carbon nanotube here covers a general class of carbon materials, including multi-walled carbon nanotubes (MWCNTs) and nanofibers (CNFs). These nanostructured carbon materials have physical and chemical properties that make them especially suitable for use as nanoelectrodes according to this invention. Well-aligned arrays of MWCNTs/CNFs have been grown by plasma-enhanced chemical vapor deposition on metal lines that have been pre-patterned by use of lithographic techniques. A previously published “bottom-up” scheme for fabricating an array of MWCNTs/CNFs that protrude from metal lines embedded in an SiO₂ matrix has been adopted as the basis of a scheme for fabricating nanoelectrode arrays according to the invention. The fabrication processes involved in these schemes are compatible with those used in manufacturing semiconductor devices. Hence, it should be possible to fabricate the nanoelectrode arrays at relatively low cost.

This work was done by Jun Li and M. Meyyappan of Ames Research Center and Russell Andrews, an Ames associate. Inquiries concerning rights for the commercial use of this invention should be addressed to the Ames Innovative Partnerships Office at (650) 604-2954. Refer to ARC-15062-1.