Excimer Laser

Coherent (Santa Clara, CA) has introduced the LAMBDA SX 315C excimer laser designed for low-temperature polysilicon (LTPS) crystallization used in the manufacture of flat-panel displays (FPD). The laser features pulse energy of up to 1,050 mJ and pulse stability of 0.5%. It offers an average power of 315W stabilized, and is suitable for micromachining and packaging applications in microelectronics, such as laser direct patterning of flex circuits and laser lift-off. The LAMBDA SX 315C provides the ability to reach mobility levels to minimize threshold voltage variations of thin-film transistors, enabling active-matrix organic light-emitting displays. The laser’s proprietary PowerLok^TM and TimeLok^TM technologies provide laser stability.