Voice Coil Motor

Equipment Solutions (Sunnyvale, CA) has introduced the RVC-5 rotational voice coil motor that creates rotational translation using a flexure bearing. The rotational translation is achieved by tilting a precision mirror, grating, or other user-supplied load ±5°. Typical applications include semiconductor fabrication, scanning microscopy, circuit board assembly, micro manufacturing, and laser marking.

The motor measures 1.0 × 1.54 × 0.61" and has fully integrated absolute angle position sensor electronics. The non-contact electrooptic sensor directly monitors the user load with micro-radian scale resolution and repeatability. This motor stage can be commanded to oscillate or move to any fixed point in its angular range following a completely linear velocity move profile.