Piezosystem jena (Hopedale, MA) has introduced the PX 100 CAP piezoelectric nanopositioning stage that features a travel range up to 100 μm of motion in closed-loop mode. A highresolution capacitive feedback sensor is built in. The sensor measures a deviation with sub-nanometer accuracy, and operates in a direct metrology fashion. The stage measures 40 × 40 × 20 mm, and is designed for highprecision positioning of small components such as mirrors or other optical components.

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Automation Motion Control

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    This article first appeared in the August, 2012 issue of Motion Control & Automation Technology Magazine (Vol. 36 No. 8).

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