High-Accuracy Galvo Scanner

The highly repeatable and thermally stable feedback sensors used on the AGV-HPO scanner systems from Aerotech (Pittsburgh, PA) can be calibrated down to single-digit, micron-level accuracy over the field of view. With the extremely low thermal gain drift performance of the position transducers, complex, high-density laser machining applications will maintain consistent micron-level feature placement accuracy over the lifetime of the process.

Most scanner control interfaces are on the same surface as the laser input aperture which can create interference problems if the laser beam path approaches the scanner from the top. The AGV-HPO control connections consist of two 300 mm cables terminated in 25-pin D-style connectors. The cables can be oriented in any direction to ensure there is no interference with beam delivery. The AGV-HPO is also available with right-side and left-side input apertures for “mirror image” machine builds or side-by-side scanner mounting with a single laser beam split to source both scanners. The AGV-HPO family is available with 10, 14, 20, and 30 mm input apertures and can be equipped with an F-Theta or telecentric lens directly from Aerotech.