The SIF1010/1012 flow sensor from Servoflo Corp. (Lexington, MA) includes a MEMS thermal flow die that measures gas or liquid flow. The die has thermal isolation and a ceramic film coating to protect the component from abrasive wear. The SIF1010/1012, conditioned and stabilized so burn-in at the application end is not required, includes a medical-compatible, straight-through flow housing.
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