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Open Frame, XY Linear-Motor Stage

Aerotech’s (Pittsburgh, PA) PlanarDLA integrated, open-frame stages have high dynamics and exceptional geometric performance in a low-profile package. These stages are essential for applications ranging from two-sided LED wafer processing where high-dynamics and micrometer-level straightness are required, to quasi-static optical metrology where high-accuracy and precise geometric performance are necessary.

The PlanarDLA XY design is optimized for applications where straightness and flatness of motion are critical. High-precision roller bearings, precision-machined surfaces, and noncontact direct-drive linear motors driving through the axes’ center-of-stiffness result in a positioning stage with straightness to ±0.5 µm and flatness to ±1.25 µm. The PlanarDLA enables high-throughput, high-accuracy processing with 2 m/s velocities and 2 g accelerations.

The PlanarDLA is available in three positioning performance options. High-performance -PLUS and -ULTRA options enable accuracies and straightness values to ±500 nm and orthogonality to 5 µrad.

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