Aerotech HexGen Hexapod Six DOF Positioning System
Aerotech's HEX500-350HL hexapod is ideal for applications in x-ray diffraction, sensor testing, high-force device manipulation, synchrotron sample or optics adjustment, semiconductor manufacturing and inspection, or satellite sensor testing. The HEX500-350HL provides up to ±0.5 μm linear/±2.5 μrad angular positioning accuracy and 20 nm linear/0.2 μrad angular positioning resolution.
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