High-Precision: White Light Interferometers for Distance and Thickness Measurements

The innovative white light interferometers are used for high-precision distance and thickness measurement with a subnanometer resolution offering an absolute measuring range of 2.1 mm. The compact and robust sensors are ideal for integration in confined spaces. The controller has an active temperature control, which compensates for changes in the ambient temperature and thus achieves an enormous temperature stability. With a resolution of < 30 picometers, the innovative interferoMETERs from Micro-Epsilon achieve a new level of precision in optical measurement technology. Depending on the application, three different versions are available. The IMS5400-DS for high precision and industrial distance measurements; the IMS5400-TH for precise thickness measurements; and the IMS5600-DS with vacuum-suitable design for distance measurements of subnanometer accuracy.