White Paper: Robotics, Automation & Control
How to Accomplish High Precision Absolute Measurements With White Light Interferometers
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The requirements for distance and thickness measurements are extremely high in many applications, including the production of film, flat glass, electronics, displays and semiconductor wafers. Micro-Epsilon accomplishes this level of precision with an innovative white light interferometer that can obtain absolute measurement distances without the need for a reference. This whitepaper explores how to achieve nanometer precision with white light interferometers in industrial environments, clean rooms or under ultra-high vacuum.
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