White Paper: Motion Control
Revolutionizing Torque Transmission: Achieving a Tenfold Increase in Magnetic Feedthrough Capacity for Semiconductor Processing
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This whitepaper details the development of an enhanced magnetic feedthrough designed to transmit torque to mechanisms within vacuum chambers, essential for semiconductor processing where motor outgassing and cleanliness are critical concerns. The existing design’s torque capacity was insufficient to meet the demands for increased system throughput. To address this, the project aimed to double the coupling torque without altering the mechanical envelope. Remarkably, by modifying specific internal components, the torque-carrying capacity was increased tenfold. The use of INTEGRATED’s AMPERES™ software enabled rapid simulation and validation of these modifications, reducing the design iteration time to just two hours compared to the conventional trial-and-error approach. This significant improvement demonstrates the effectiveness of simulation tools in optimizing mechanical designs, ensuring higher performance and efficiency in vacuum chamber applications while maintaining stringent cleanliness standards. The findings have broad implications for both dry and wet environment torque transmission mechanisms, including various pump systems in the market.
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Overview
The white paper authored by David Lancisi discusses the design and optimization of a magnetic feedthrough device intended for use in vacuum chambers, particularly in semiconductor processing applications. The primary challenge addressed is the need to transmit torque without placing motors directly in the vacuum space, which can lead to contamination from outgassing of motor varnishes and adhesives.
David Lancisi, who has over 30 years of experience in designing motors and magnetic devices, outlines the existing design of a magnetic coupler that was insufficient in coupling torque for the required applications. The goal of the project was to enhance the coupling torque by a factor of two while maintaining the same mechanical envelope.
Using INTEGRATED Engineering Software’s AMPERES™ 3-dimensional magnetic field solver, the original design was modeled and analyzed. The initial configuration featured an array of magnets on the outer shell and a rotor with machined teeth made of magnetic iron. The analysis revealed that the peak torque the coupler could handle was approximately 250 in-lbs before slipping occurred.
To improve performance, the first modification considered was increasing the magnet strength from 32 MGOe to 50 MGOe. However, this change only resulted in a torque increase to about 300 in-lbs, which was still below the desired threshold. The next approach involved replacing the rotor's metal teeth with magnets, which aimed to enhance the magnetic field interaction while preserving the overall shape of the device.
Subsequent simulations demonstrated that this modification significantly increased the torque capability of the coupler by a factor of 10, exceeding the design intent and providing a robust solution for future performance requirements in mechatronic systems.
The conclusion emphasizes the efficiency of using AMPERES™ for rapid simulation and design iterations, allowing for quick assessments without the need for physical prototypes. The paper highlights the value of simulation tools in developing innovative, industry-leading devices and acknowledges the support from INTEGRATED for continuous software improvements.
Overall, the study illustrates the potential for significant advancements in magnetic device design through strategic modifications and the application of advanced simulation techniques, ultimately contributing to enhanced performance in vacuum environments.