MEMS Inclinometer

TURCK (Minneapolis, MN) offers the Q42 dual-axis inclinometer sensor with a CANopen interface for angular tilt detection, and angle measurements of ±10, 45, and 60 degrees. The device measures angular tilt in reference to gravity. It features a MEMS device that incorporates a microelectromechanical capacitive element into the sensor that utilizes two parallel plate electrodes — one stationary and one attached to a spring-mass system. Movement causes acceleration that produces deflection in the non-stationary electrode. This results in a measureable change in the capacitance between the two plates that is proportional to the angle of deflection. All measured values and parameters are accessible via the object directory. The micro board design in the MEMS technology allows for a compact device in an industrialized package.