Alpine Research Optics (ARO, Boulder, CO) provides off-the-shelf intracavity resonator optics for excimer lasers. These are rear high reflectors and uncoated output couplers for use with ArF (193 nm), KrF (248 nm), and XeCl (308 nm) excimer lasers. Both rear mirrors and output couplers are offered in 38.1 mm diameter MgF2 substrates. The optics are specified to have ×/10 flatness and ×/8 wavefront distortion on transmission (633 nm), and a surface quality of 10-5.
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