Aerotech (Pittsburgh, PA) offers the ABRT series rotary air-bearing stages that provide 360-degree continuous travel with resolution to 0.027 arc sec. Payload capacity is up to 69 kg.
The ABRT series features a direct-drive, slotless, brushless servomotor; zero-cogging motor for velocity stability; and a direct coupled rotary encoder. Its design features large air-bearing surfaces and preloading for stiffness and load capacity. It offers axial and radial error motions asynchronous to <20 nm for each, and tilt error motion asynchronous to <0.04 arc sec. The stage family provides a clear aperture up to 50 mm in diameter that can be used for product feed-through, laser beam delivery, or cable clearance.
The ABRT series utilizes a version of Aerotech’s S-series slotless, brushless motor for positioning performance. The S-series motor uses a magnetic circuit design to produce torque output with minimal heat generation. The slotless design is inherently zero-cogging and torque-ripple-free. Maximum speed is up to 1,200 rpm.
The line of rotary air-bearing stages is designed to meet the requirements of DVD mastering, wafer inspection, metrology applications, X-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication.