ON Semiconductor (Phoenix, AZ) has collaborated with Teledyne Imaging Sensors (Camarillo, CA) to manufacture an Extremely Large Stitched Read Out Integrated Circuit (ELS ROIC) for astronomy. The H4RG-15 image sensor, designed by Teledyne, is the latest generation of a 20-year effort sponsored by the National Science Foundation, the National Aeronautics and Space Administration, and Teledyne internal funding to develop increasingly larger and more powerful infrared sensors for astronomical research.
The 16 megapixel H4RG-15, which consists of Teledyne’s HgCdTe detector material hybridized to a CMOS readout circuit, is the largest sensor ever produced for infrared astronomy. An enabling technology in the development of the H4RG-15 is the ability to fabricate and reliably yield the 63mm x 63mm stitched CMOS ROIC using ON Semiconductor’s proprietary 180 nanometer process technology. The ROIC is so large that only four die fit onto a 200mm wafer.