Because the cost of building and maintaining cleanrooms is very expensive, the physical size of components is always critical. We define the cleanroom industry here broadly to include semiconductor manufacture, laboratory equipment, medical devices, nano- technology, and biotechnology applications, to name a few. This turbo molecular vacuum pump provides a higher exhaust capacity than existing turbo molecular pumps without a corresponding increase in the physical size and weight of the pump. Additionally, it creates less vibration than other pumps having the same capacity.

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