Keithley Instruments (Cleveland, OH) has introduced triaxial cable kits for semiconductor device probers that are capable of handling I-V, C-V, and pulsed I-V signals. Model 4210-MMPC-C is optimized for use with Cascade Microtech probers, and Model 4210-MMPC-S for use with SUSS Microtech probers. The cables are designed for compatibility with Keithley’s Model 4200-SCS Semiconductor Characterization System, as well as with other test instruments used for characterization.

The design of the highperformance triaxial cable kits makes them ideal for applications with requirements that demand frequent switching between measurement types. The cable kits eliminate the need for recabling when switching between measurement types, also eliminating the measurement errors that often result from cabling errors. The setup changes can be made while the probe needles are in contact with a wafer, reducing pad damage and maintaining the same contact impedance for all three types of measurements.

The kit replaces a variety of electrical test tools with a single, tightly integrated characterization solution and is ideal for a wide variety of applications including semiconductor technology development, process development, materials research in reliability labs, materials and device research labs and consortia, as well as any lab needing a benchtop DC or pulse instrument.

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This article first appeared in the January, 2010 issue of Embedded Technology Magazine.

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