Physik Instrumente (Auburn, MA) offers the H-850KMLD 6-axis hexapod positioning system with 1,000-pound load capacity that provides 1-μm minimum incremental motion over a 100-mm travel range in XY, and 0.5-μm in the Z direction. Repeatability in the three linear axes is ±1μm, and ±5μrad/9μrad in the rotary axes. The hexapods include a controller and software package. The dedicated C-887 hexapod multiaxis-vector controller is commanded directly in Cartesian coordinates. The user can specify a random pivot point in space with a single software command. LabVIEW and text-based programming languages under Microsoft Windows or Linux are supported by libraries and program examples. For loads above 2,000 pounds, standard H-845 and custom hexapods are available.
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