Aerotech’s PlanarDLA integrated, open-frame stages from Aerotech (Pittsburgh, PA) are suited for applications ranging from two-sided LED wafer processing where high dynamics and micrometer-level straightness are required, to quasi-static optical metrology where high accuracy and precise geometric performance are necessary. The XY design is optimized for applications where straightness and flatness of motion are critical. High-precision roller bearings, precision-machined surfaces, and non-contact direct-drive linear motors driving through the axes’ center-of-stiffness result in a positioning stage with straightness to ±0.5 μm and flatness to ±1.25 μm.

The stages are available with one or two motors per axis, allowing optimization of each axis for the specific application and process. With two motors, the resulting drive force acts through the centers of friction and stiffness for accuracy, while one motor per axis is the economical choice if high-throughput and strict positioning performance are not required. The standard cable management system is integrated into the stage. Several standard options are available for additional servo axes, air/vacuum lines for vacuum chucks, or other process pneumatics.

For Free Info Click Here 

Motion Control & Automation Technology Magazine

This article first appeared in the September, 2015 issue of Motion Control & Automation Technology Magazine.

Read more articles from this issue here.

Read more articles from the archives here.