The Planar ServoRing™ rotary table PSR300 from IntelLiDrives (Philadelphia, PA) features a low profile and minimizes stage height. Angular contact bearings are used to minimize wobble, moment stiffness, and friction. The table has a clear center aperture that can be used for air or wire line feed-through or beam delivery. Brushless direct drive uses three-phase planar brushless motor technology. A low-cog magnetic design enables smooth rotation. The table features an 18,000-line encoder for 0.1 arc-sec positioning resolution, and the motor and rotary encoder are directly coupled to eliminate backlash.
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