Heidenhain (Schaumburg, IL) offers ETEL ILF and ILM series ironless high-speed linear motors for use in the semiconductor and electronics industry. The motors utilize an ironfree coil design for zero-attraction force between the carriage and the magnetic way. The ILF is a smallersized motor for very high dynamic and low-moving mass applications; the ILM is a more powerful version of the ILF, and has an option to be air-cooled to increase continuous force output. The ironless motors come in a variety of lengths and heights with different degrees of force, and share the same profile so that one is interchangeable with the other. The motors can reach speeds of up to 20 m/s and peak force of up to 2,500 N. They are designed for direct drive applications and offer no backlash, fewer parts, and require no maintenance.

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