Optimal Engineering Systems (Van Nuys, CA) released low-profile XYθ (theta) stages that move in an XY-plane and rotate around the center of the XY-plane. Available in 12 models in two precision grades, the stages have linear travels from ±2 by ±2 mm, up to ±30 by ±30 mm. The stages can rotate around the center of the XY plane up to ±6°. Four models have solid tables sized from 100 x 100 mm to 200 x 200 mm, and eight stages from 250 x 250 mm to 1500 x 1500 mm are hollow core (open frame) stages. Available in normal and precision grades, they have preloaded cross roller bearings, and typical normal repeated positioning accuracy is from ±1.75 μm to ±2.5 μm; typical precision repeated positioning accuracy is from ±0.7 μm to ±1.0 μm.
Parallelism of the stages is as low as 30 μm, and the larger stages can handle dynamic loads to 600 kg. The stages can be ordered with linear encoders for closed loop operation, customized to meet specific requirements, and complete ready-to-run alignment systems.
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