The FizCam DUV interferometer from 4D Technology (Tucson, AZ) provides accurate measurement of optics and optical systems at 193 nm wavelength (deep ultra-violet), even in the presence of vibration and air turbulence. The FizCam DUV incorporates a single camera, high-speed optical phase sensor that measures in less than 5 milliseconds. Motorized controls include 2X discrete optical zoom, focus, polarization, input beam alignment, transmission flat tip/tilt, and optional return flat tip/tilt. FizCam DUV components are stainless/electroless nickel-plated.
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