CyberOptics Semiconductor (Beaverton, OR) introduces its WaferSenseTM Auto Vibration System (AVS) that monitors three-axis accelerations and equipment vibration. The WaferSense AVS is a wireless, wafer-like accelerometer available in a 200mm or 300mm format that moves through semiconductor process equipment and automation material handling systems. It reports x, y and z acceleration, has a range of ±2 G, and can detect wafer slides, slips, bumps, scrapes and rough handling.

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Photonics Tech Briefs Magazine

This article first appeared in the November, 2008 issue of Photonics Tech Briefs Magazine.

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